How to select a Capacitive Dosplacement Sensor

When selecting
a non-contact capacitive displacement sensor, a number of key
factors need to be considered, including target size and shape,
guarding method and bandwidth. As well as clean environments,
the sensors can also operate in dirty, dusty industrial areas
too, says Chris Jones of Micro-Epsilon.
The capacitive
measuring principle is one of the traditional methods used for
distance, displacement and position measurement. Considered as
one of the most reliable and thermally stable of the non-contact
displacement measuring techniques, capacitive sensors achieve
resolutions well below one nanometre.
Contrary to what
many engineers may think, non-contact capacitive displacement
sensors are not only suitable for use in clean environments such
as laboratories, clean rooms and operating theatres. The latest
sensors are designed to operate in dirty, dusty industrial environments
too. Modular designed sensors with threaded bodies are also available,
which simplifies mounting of the sensors in industrial or process
manufacturing environments.
Unmatched
precision
Capacitive sensors operate on a non-contact, wear-free basis.
In practice, capacitive displacement sensors achieve excellent
results in terms of linearity, reproducibility and resolution.
While sub-micrometre precision is reached in typical industrial
environments, high precision sub-nanometre measurements are possible
in clean environments, where dirt, dust, oil or moisture are
not present.
Capacitive measurement
systems are also suitable for the detection of fast moving objects
and dynamic high speed processes, enabling fast, reliable measurements
of motion sequences. Capacitive sensors are also suitable for
use in vacuums and ultra high vacuum applications.
Measuring
principle
Non-contact capacitive sensors operate by measuring changes in
electrical capacitance. Capacitance describes how two conductive
objects with a space between them respond to a voltage difference
applied to them. When a voltage is applied to the conductors,
an electrical field is generated between them, which causes positive
and negative charges to collect on each object. Capacitive sensors
use an alternating voltage that causes the charges to continually
reverse their positions. This creates an alternating electric
current that is detected by the sensor. The capacitance is directly
proportional to the surface area of the objects and the dielectric
constant of the material between them, and inversely proportional
to the distance between them.
The principle
of capacitive displacement measurement is based on how an ideal
plate-type capacitor operates. The distance displacement of the
plates (sensor and measurement object) leads to a change in the
total capacity. If an alternating current of constant frequency
and constant amplitude flows through the sensor capacitor, the
amplitude of the alternating voltage on the sensor is proportional
to the distance to the target (ground electrode). The distance
change between the measurement object and the controller is detected,
processed and output as a measurement value by the controller
via different outputs.
However, to ensure
stable measurements, a continuous dielectric constant between
sensor and target is required, as the system not only depends
on the distance between the electrodes but also reacts to dielectric
changes in the measuring gap. In order to achieve the highest
possible measurement precision (i.e. in the nanometre range),
the environment should be relatively clean and dry.
Maintaining a
continuous dielectric constant between the sensor and target
is the most important factor in ensuring stable measurements.
The operating environment therefore needs to be relatively clean
and dry. Oil or moisture in the air gap, for example, can affect
measurement performance by causing sensor drift and changes in
the output signal. However, some dust or dirt in the air gap
is acceptable, as the sensors typically operate at such high
resolutions that the effects of some dust particles is quite
low.
Material types
As an electromagnetic process, a capacitive measuring system
measures on electrically conductive objects with constant sensitivity
and linearity as standard. The system evaluates the reactance
of the plate capacitor, which changes in proportion to the distance.
As there is no interference caused by the optical characteristics
of the target, even transparent or reflective surfaces can be
measured at high precision. Examples of conductive measurement
objects are metals, silicon, graphite and water.
Capacitive sensors
can also measure insulating materials such as plastics, ceramics,
glass, oils and adhesives. Here, the sensor grounding acts as
ground electrode and the insulating material as a coupling medium.
An almost linear output signal for insulators is also achieved
by using special electronic circuitry. Capacitive displacement
sensors are typically used on metals, but advice and guidance
should be sought from the sensor supplier when measuring on insulators.
Active guarding
In most capacitive sensing applications, the sensor is one of
the conductive objects and the target object is the other. For
accurate measurements, the electric field from the sensing area
needs to be contained within the space between the sensor and
the target. If the field is allowed to spread to other items
or areas on the target, a change in the position of the other
item will be measured as a change in the position of the target.
Guarding is therefore used to prevent this from happening.
Most sensor suppliers
use a guard ring principle, although some suppliers such as Micro-Epsilon
offer a guard ring principle combined with a special triaxial
cable (double guarding). Extremely small measuring distances
cause an equally small change in the signal. This means there
are only a few electrons between sensor and controller for an
indicated change in distance. If only very small leakage (parasitic)
currents also now flow on the path from sensor to the controller,
the distance measurement is no longer accurate. Therefore, very
complex triaxial cables are required.


The RF cables used by Micro-Epsilon provide excellent shielding
characteristics, actively guarding the field in order to ensure
consistently high signal quality with low noise. Micro-Epsilon
has also developed other, unique cables that allow cable lengths
of up to eight metres without having to use an additional preamplifier,
which at the same time enables full exchangeability between sensor,
controller and cable. While the previous outgas-optimised and
oxygen-free (CCx) triaxial cables are suitable for different
applications from very low temperatures through to laboratories
and semiconductor production, these new (CCg) cables are specifically
designed for industrial environments, where long cable lengths
are advantageous.
High stability
As thermally induced conductivity changes of the measuring object
have no influence on measurements, the capacitive principle is
reliable even with fluctuations in temperature. As well as temperature
stability, the long term stability guarantees reliable operation
over many years without parts or components needing to be replaced.
Calibration
In an experimental environment where the measuring range will
typically vary from test to test, the user requires a capacitive
measurement system that allows this. A system that needs re-calibrating
each time a different measuring range is required would be costly
and time consuming. It is therefore important to select a sensor
supplier that can offer a system whereby various capacitive sensors
can be exchanged without having to send the sensor back to the
supplier's factory for recalibration each time.
Electrical
runout and bandwidth
Electrical runout occurs in rotating ferrous targets. It shows
up as a very repeatable error once per revolution on the system
output and is caused by small variations in the permeability
and conductivity along the circumference of, for example, a rotating
shaft. Whilst eddy current displacement sensors are affected
by electrical runout, capacitive sensors are completely unaffected
by this problem.
As they are based
on an analogue circuit, capacitive sensors measure using a measurement
frequency or bandwidth rather than a measuring rate. This means
they are suitable for measuring vibration, amplitude, oscillation
and shaft runout. Some suppliers offer capacitive sensors that
measure up to 20kHz (-3dB) bandwidths, making them ideal for
high speed measurements on rotating shafts.
Target size
and shape
The target size is a key consideration when selecting a sensor
for a specific application. The further the sensor is from the
target, the larger the minimum target size. If the target area
is too small, the electric field will tend to wrap around the
sides of the target, which results in the electric field extending
further than it was during factory calibration and will measure
the target as further away. In general, capacitive sensors require
a target size ratio of 1:1 with the size of the measurement electrode.
Smaller or narrower targets can be measured but require some
special adaptation from the supplier.
The shape of
the target is also important. As most sensors are calibrated
to a flat target, measuring a target with a curved surface will
cause errors. As the sensor will measure the average distance
to the target, the gap at zero volts will be different to when
the sensor was calibrated. The electric field behaves differently
on a curved surface compared to a flat surface. If a curved or
non-flat surface must be measured, the measurement system can
be factory calibrated to the final target shape. However, it
is recommended that advice is sought from the sensor supplier
as some customisation will be required.
March 2018